Phidix Motion Controls (Shanghai) Co., Ltd.
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Magnification 1X-300000X Scanning Electron Microscope 3nm Resolution with Optional BSE,EDS,EBSD,WDS and CL
M22006 is a cost-effective tungsten filament scanning electron microscope for the observation of nanoscale microstructures. It has a magnification of up to 300,000x and a resolution better than 3nm and is also equipped with a 370mm diameter sample chamber. It is a high-performance scanning electron microscope with ultra-high resolution and excellent image quality. The magnification is continuously adjustable, and clear images with high brightness can be obtained in different fields of view. The depth of field is large and the image is rich in stereo. Equipped with a large sample chamber and low voltage mode greatly expands the range of applications.
Specials:
- Magnification Max 300000X.
- Signal Detection: Secondary Electron Detector (SED).
- Accelerating Voltage: 1~30KV, High image resolution.
- BSE/EDS/EBSD/WDS/CL is optional, for component analysis.
- High Vacuum System.
- Three Axis Automatic (Standard).
| Item | Specification | M22006 |
| Resolution | 3nm@30kV(SE) | ● |
| Magnification | 1X~300000X | ● |
| Accelerating Voltage | 1~30kV | ● |
| Signal Detection | Secondary Electron Detector (SED) | ● |
| Electron Gun | Pre-aligned medium-sized fork-type tungsten filament | ● |
| Auto Function | Auto Brightness Contrast, Auto Focus | ● |
| StageSystem/Movement | Control Method: Automatic Valve | ● |
| Turbomolecular Pump:240 L/S | ● | |
| Mechanical Pump:12 m³/h(50 Hz) | ● | |
| Camera:Optical Navigation,Monitoring in the Sample Chamber | ● | |
| Sample Stage Configuration,Three Axis Automatic (Standard) | ● | |
| X: 0~100mm | ● | |
| Y: 0~100mm | ● | |
| Z: 0~60mm | ● | |
| Max Sample Diameter: 370mm | ● | |
| Max Sample Height: 68mm | ● | |
| Five Axis Automatic (Optional) | ○ | |
| X: 0~115mm | ○ | |
| Y: 0~115mm | ○ | |
| Z: 0~65mm | ○ | |
| R: 360° | ○ | |
| T: -10°~75° | ○ | |
| Max Sample Diameter: 370mm | ○ | |
| Max Sample Height: 73mm | ○ | |
| Vacuum System | Better than 9 X 10-4 Pa under High Vacuum | ● |
| Optional Detector | BSEEDSEBSDWDSCL | ○ |
| Imaging System | Image Pixel ≤ 6144 x 4096 | ● |
| Image Format: TIFF, JPG, BMP, PNG | ● | |
| Software | Language: Chinese / English | ● |
| Operating System: Windows | ● | |
| Navigation: Optical Navigation, Gesture Quick Navigation | ● | |
| Special Function: Dynamic Astigmatism | ● | |
| Installation Requirements | Space: L≥ 3000 mm, W ≥ 4000 mm, H ≥ 2300 mm | ● |
| Door Size: W ≥ 900 mm, H ≥ 2000 mm | ● | |
| Temperature: 20 ℃ to 25 ℃ | ● | |
| Humidity: ≤ 50% | ● | |
| Noise: ≤ 45dB | ● | |
| Power Supply: AC 220 V (±10 %), 50 Hz, 2 kVA | ● | |
| Ground Wire: Less than 4 Ω | ● | |
| AC Magnetic Field: Less than 100 nT | ● |
Note: ● means standard, ○ means optional
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Applications